Precision Measuring Instrument Solutions Semiconductor Industry Edition
Responding to the increasingly sophisticated production lines of the semiconductor industry
The semiconductor industry supports cutting-edge technologies such as EVs, autonomous driving, and the fifth-generation mobile communication system (5G). We offer effective precision measuring equipment solutions for semiconductor production lines, which require high levels of precision, quality, and productivity.
Semiconductor front-end applications
- Ingot outer diameter
- A/N MARK (SEMI standard): Width, position, dot diameter and depth
- Exposure device control
- CVD equipment parts: ceramic heaters, silicon rings (flatness, cross-sectional shape analysis, surface roughness)
- CVD equipment parts: shower head nozzle hole (inner diameter, roundness, position accuracy)
- Wafer Thickness
- CMP equipment parts: polishing pads (groove width, groove depth, groove pitch, surface roughness)
- Etching equipment parts: electrostatic chucks, silicon rings (flatness, cross-sectional shape, surface roughness)
- Etching equipment parts: shower head nozzle hole (inner diameter, roundness, position)
- Probe cards, IC test sockets (pin height, holes)
- Wafer prober, probe needle
Semiconductor back-end applications
- Cutting surface observation
- Chip Thickness
- Burr height on the back side after cutting
- Lead frame (width, pitch, height, twist, etc.)
- Wire Loop Height
- Lead width, pitch, height variation, gap
- Solder ball height, diameter and pitch
- Package Substrate Coplanarity
Related products
QV HYBRID TYPE4 series Vision Measuring System equipped with non-contact displacement sensor For measuring the flatness, cross-sectional shape, surface roughness, etc. of silicon rings
General-purpose Vision Measuring System(high-spec model) QUICK VISION Apex series For measuring A/N MARK width, position, dot diameter, depth, etc.
Contour Measuring Machine For measuring roughness of the back surface of a wafer, surface roughness of a polishing pad, etc.
Measuring Microscope For measuring holes in IC test sockets, wear probes, probe needles, lead frames, etc.
High-accuracy Non-contact In-line
Measuring System/Laser Scan Micrometers For measuring the outer diameter of ingots, lead width, pitch, gap, etc.
High-precision linear gauge LGH For measuring the thickness of wafers and chips
Control linear scale (linear encoder) For controlling exposure equipment, etc.
Related inquiries/FAQ
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